Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels
We propose a concept of a flexible sensor array using a novel capacitive force sensor not having a vulnerable electrode on the force applied site.It has a polymer domed structure inside which silicone oil is contained.When the EZEE RECOVERY TEA force is applied, the oil is pushed into the surrounding thin channels, where the change in capacitance d